As a result of COVID-19 virus outbreak and subsequent travel limitations
imposed by many institutions we are postponing this workshop until further notice.

Invited Speakers

Development of halogen-based chemistry towards atomically precise Si-based superconducting devices

Robert Butera

University of Maryland

Dr. Robert E. Butera received his Ph.D. in Materials Science and Engineering from the University of Illinois at Urbana-Champaign in 2010 for his investigations of halogen-induced modifications of semiconductor surfaces. He currently leads the scanning tunneling microscopy (STM)-based research efforts at the Laboratory for Physical Sciences in College Park, MD. Dr. Butera’s research group has developed several unique systems to perform atomically-precise lithography and materials characterization at cryogenic temperatures and in high magnetic fields. His current research activities focus on investigations of novel materials for quantum computing and spintronics applications, as well as the development of halogen-based chemistries for atomic-precision manufacturing of quantum electronic devices.

Fabricating and characterizing multi-species dopant-in-silicon devices for future quantum technologies

Neil Curson

University College London

Neil Curson is Professor of Nanoelectronics and Nanofabrication at the London Centre for Nanotechnology, UCL, and a visiting professor at the University of Surrey. He is also the UCL Director of the Centre for Doctoral Training in Advanced Characterisation of Materials. He received his PhD from the University of Cambridge, UK, and has previously held research posts at the Universities of Rutgers, USA, and New South Wales, Australia. His research interests are centred around understanding and controlling the behaviour of atoms and molecules at surfaces and the development and deployment of new scanning probe lithography techniques, towards fabrication of nanoscale electronic devices and atomic-scale components for quantum information processing.

The Radical Atom

James Gimzewski


Dr. James K. Gimzewski is a distinguished professor of Chemistry at the University of California, Los Angeles and member of the California NanoSystems Institute. His current research is focused on nanotechnology applied to medicine, artificial intelligence and Atomically Precise Manufacture (APM). Dr. Gimzewski is a Fellow of the Royal Society and Royal Academy of Engineering. He has received honorary Doctorates (PhD hc & DSc hc) from the University of Aix II in Marseille, France and from the University of Strathclyde, Glasgow. He is a Principal Investigator & satellite co-director of the WPI program, MANA, at the National Institute of Materials Science (NIMS) in Tsukuba, Japan. He is currently Scientific director of the UCLA Art|Sci Center. He has developed, over the past 5 years, a keen interest in environmental issues in science and teaches an undergraduate course dedicated to increase awareness of climate change and its implications for humanity.

Prior to joining the UCLA faculty in 2001, he was a group leader at IBM Zurich Research Laboratory, where he conducted research in nanoscale science and technology for more than 18 years. Dr. Gimzewski pioneered research on single atoms and molecules using scanning tunneling microscopy (STM).

“Defects” as Qubits in SiC: Challenges in Precision

Evelyn Hu

Harvard University

Evelyn Hu is the Tarr-Coyne Professor of Applied Physics and Electrical Engineering at the John A. Paulson School of Engineering and Applied Sciences at Harvard. Prior to Harvard, she was a faculty member at UCSB, in the Departments of Materials, and of Electrical and Computer Engineering. While at UCSB, she also served as the founding Scientific co-Director of the California NanoSystems Institute, a joint initiative between UCSB and UCLA. Before joining UCSB, she worked at Bell Labs in both Holmdel and Murray Hill. She is a member of the National Academy of Sciences, the National Academy of Engineering, the American Academy of Arts and Sciences, and the Academica Sinica of Taiwan. She is a recipient of an NSF Distinguished Teaching Fellow award, an AAAS Lifetime Mentor Award, and holds honorary Doctorates from the University of Glasgow, Heriot-Watt University, Hong Kong University of Science and Technology, the University of Notre Dame, and ETH Zurich.

Deep learning and automated experimentation for atomic fabrication in probe and electron microscopy

Sergey Kalinin

Oakridge National Lab

Sergei Kalinin is the distinguished staff member at the Center for Nanophase Materials Sciences at Oak Ridge National Laboratory. He received his MS degree from Moscow State University in 1998 and Ph.D. from the University of Pennsylvania (with Dawn Bonnell) in 2002. His research presently focuses on the applications of big data and artificial intelligence methods in atomically resolved imaging by scanning transmission electron microscopy and scanning probes for atom by atom fabrication, extraction of relevant physics and chemical behaviors on the single-atom levels, as well as mesoscopic studies of electromechanical and transport phenomena via scanning probe microscopy. Sergei has co-authored >600 publications, with a total citation of >30,000 and an h-index of >85. He is a fellow of MRS, APS, IoP, IEEE, Foresight Institute, and AVS; a recipient of the RMS medal for Scanning Probe Microscopy (2015); Blavatnik Award for Physical Sciences (2018), Presidential Early Career Award for Scientists and Engineers (PECASE) (2009); Burton medal of Microscopy Society of America (2010); 4 R&D100 Awards; and a number of other distinctions.

Hydrogen resist lithography and silicon-based nanofabrication

Joseph Lyding


Joseph Lyding is the Robert C. MacClinchie Distinguished Professor of Electrical and Computer Engineering at the University of Illinois at Urbana-Champaign. He received his PhD in Electrical Engineering from Northwestern University in 1983. He joined the Illinois faculty to work with Nobel laureate John Bardeen on the 1D charge-density wave problem. During that time, he developed the first scanning tunneling microscope in the Midwestern United States, with which he developed the atomic resolution hydrogen resist process for patterning silicon surfaces. In these experiments, he also discovered the giant deuterium isotope effect that is now being used in large-scale chip production to reduce hot-carrier degradation in CMOS technology. Recently, he has developed a method to improve the performance of carbon nanotube transistors and he invented a technology for producing ultra-sharp hard-coated electrically conductive probes for scanned probe microscopy that has recently been commercialized. Lyding was selected as a UIUC University Scholar, and he is a Fellow of the APS, IEEE, AVS and AAAS. He received the 2012 IEEE Pioneer in Nanotechnology Award, the 2013 AVS Nanotechnology Recognition Award, the 2013 Research Excellence Award from the Nano/Bio Interface Center at the University of Pennsylvania, the 2014 AVS Prairie Chapter Award for Outstanding Research, and the 2014 Feynman Prize in Nanotechnology.

Digital electronics at the atomic limit

Shashank Misra

Sandia National Lab

Shashank Misra earned a PhD in physics from the University of Illinois at Urbana-Champaign in 2005, and since 2013 has served as a member of the research staff at Sandia National Laboratories. His research interests include developing instruments, techniques, and devices that provide new access to exotic phases in quantum materials, quantum phase transitions, and quantum effects in semiconductors. More recently, his interests have turned to using chemical vapor deposition and STM-based lithography to fabricate atomically precise dopant devices in semiconductors. These include making physics-enabled transistors for everything from cryogenic analog to room-temperature digital applications.

Control of Scanning Tunneling Microscope For Atomically Precise Lithography and Imaging

Reza Moheimani

UT Dallas

Dr. Reza Moheimani currently holds the James Von Ehr Distinguished Chair in Science and Technology in the Department of Systems Engineering at The University of Texas at Dallas with appointments in the departments of Electrical and Computer Engineering and Mechanical Engineering Departments. His current research interests include applications of control and estimation in high-precision mechatronic systems, high-speed scanning probe microscopy and atomically precise manufacturing of solid-state quantum devices. Moheimani is a Fellow of IEEE, IFAC and the Institute of Physics, U.K. He is a recipient of several awards, including IFAC Nathaniel B. Nichols Medal and IEEE Control Systems Technology Award. He is editor-in-chief of Mechatronics.

Developing the Scanning Tunneling Microscope as a Tool for Atomically Precise Manufacturing

James H.G. Owen

Zyvex Labs

James H.G. Owen is the Director of the Atomically Precise Manufacturing Division. James joined Zyvex Labs in 2010 as a Research Scientist. Before returning to his roots — hot STM of hydrogen and disilane on Si(001) — when he joined Zyvex, James worked at UCSB, UCLA and HRL, the National Institute for Materials Science (Tsukuba, Japan) as an Independent Research Fellow, and was a member of the Oxford University QIP IRC. Finally, he worked with Prof. Renner at the University of Geneva setting up a new research group. Throughout his career, he has used STM to study atomic-scale chemistry, atomic-scale self-assembled nanostructures and epitaxial growth processes on semiconductors, with a particular emphasis on close collaboration with computational modellers. Of 76 peer-reviewed articles (>1500 citations), 22 relate to hydrogen, ammonia (NH3) and disilane on Si(001) and ~50% were written jointly with DFT modelers. James has a BEng and MA (Oxon) in Metallurgy and Science of Materials (1993) and a DPhil (Oxon) in Materials Science (1996).

Analysis and Control of Quantum Networks

Ian Petersen

Australian National University

Ian R. Petersen was born in VIC, Australia. He received the Ph.D. degree in electrical engineering from the University of Rochester, NY, USA, in 1984. From 1983 to 1985, he was a Post-Doctoral Fellow with The Australian National University, Canberra, ACT, Australia. In 1985, he joined the University of New South Wales, Canberra. In 2002 and 2003, he was the Executive Director for Mathematics, Information, and Communications with the Australian Research Council, Canberra, Australia. In 2004 and 2005, he was the Acting Deputy Vice-Chancelor Research with the University of New South Wales. He held an Australian Research Council Professorial Fellowship from 2005 to 2007, an Australian Research Council Federation Fellowship from 2007 to 2012, and an Australian Research Council Laureate Fellowship from 2012 to 2017. In 2017, he moved to The Australian National University, where he is currently a Professor in the Research School of Engineering. His current research interests include robust control theory, quantum control theory, and stochastic control theory. Dr. Petersen is the Fellow of IFAC and the Australian Academy of Science. He was Elected IFAC Council Member for the 2014–2017 Triennium. He was also elected to be a member of the IEEE Control Systems Society Board of Governors for the periods 2011–2013 and 2015–2017. He is the Vice president for Technical Activity for the Asian Control Association. He was the General Chair of the 2012 Australian Control Conference and the 2015 IEEE Multi-Conference on Systems and Control. He has been an Associate Editor of the IEEE TRANSACTIONS ON AUTOMATIC CONTROL, IEEE SYSTEMS AND CONTROL LETTERS, Automatica, and SIAM Journal on Control and Optimization. He is currently an Editor for Automatica in the area of optimization in systems and control.

Atom-based Silicon Devices for Quantum Computing and Analog Quantum Simulation

Richard Silver


Richard Silver is a physicist leading the atom-based silicon quantum electronics effort at NIST. His research focusses on fabrication, design, and measurement of atom-based Si structures that rely on single or few atoms, precisely placed within an epitaxial silicon environment for solid state quantum computing and analog quantum simulation. Recent work is focused on low temperature, high frequency measurements and manipulation of STM patterned donor/dot devices and few atom quantum dot arrays. He received his Bachelors in Physics from the University of California at Berkeley and his PhD in physics from University of Texas at Austin. He is an adjunct professor with the Physics Department and Chemical Physics Program at the University of Maryland, College Park, and is a Fellow of the SPIE.

Far Faster Fabrication of Binary Atomic Silicon Logic Circuitry

Robert Wolkow

University of Alberta, Canada

Robert Wolkow is a professor in the Department of Physics, iCORE Chair of Nanoscale Information and Communications Technology at the University of Alberta and Fellow of the Royal Society of Canada. He is also the principal research officer and nanoelectronics program coordinator at the National Institute for Nanotechnology (NINT), AITF Industrial Chair in Atom Scale Fabrication and chief technology officer of Quantum Silicon Inc. He received his bachelor's degree from the University of Waterloo, his PhD from the University of Toronto and did postdoctoral work at the IBM TJ Watson Research Centre before becoming a staff scientist at Bell Laboratories. He has received multiple awards for outstanding achievement, most recently the ASTech Outstanding Leadership in Alberta technology 2015, Innovation Patent Award 2017, Innovation Makes Sense Spin Off Award 2015, Innovation Makes Sense Patent Award 2016, and the AVS Nanotechnology Recognition award for 2020.